Array of coupled nanoresonators

A novel system based on NEMS resonators will be developed. An array of coupled nanoresonators with a transduction based in the strain of thin layers of metal will be developed. To do that, analytical studies, FEM simulations, design and fabrication will be performed. The characterization will be done in three steps: measure frequency response of the system and characterization of the mass sensitivity (outgoing phase) and its use as a biosensor (return phase).